In this paper, a novel structure for Ka-band micro electromechanical switches with low actuation voltage is proposed. In this structure, the membrane of the switch is chosen to be a Koch fractal. We have analyzed these switches in order to extract their parameters such as insertion loss, return loss and deformation posture. The effect of the actuation voltage on the deformation of the bridge has been analyzed and the results are compared with simple rectangular bridges. It is shown that bias voltage of these kinds of switches is remarkably lower than that of its other counterparts. This switch may be used as a low loss and effective element for more complicated systems such as distributed phase shifters and phased arrays.
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doi:10.1109/TMTT.2003.821941
6. Hayden, J. S. and G. M. Rebeiz, "Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-airmetal capacitors," IEEE Transactions on Microwave Theory and Techniques, Vol. 51, No. 1, January 2003.
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doi:10.1109/7260.905952
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