The complex permeability of ferromagnetic thin films is measured up to 10 GHz by using shorted microstrip method combining with conformal mapping. The S-parameters are measured by vector network analyzer (VNA), and the effect of thin film placed both upwards and downwards in the fixture are investigated. The experimental results show that the complex permeability of the thin films is measured accurately from 500 MHz to 10 GHz, and loading the samples with thin film placed downwards can avoid the electromagnetic resonance effectively.
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