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Standing Wave Effects in Microwave Ellipsometry

By Lawrence R. Lawson and Hashim A. Yousif
Progress In Electromagnetics Research Letters, Vol. 14, 51-58, 2010


Unlike ellipsometry using light, ellipsometry using microwaves can be subject to significant standing wave effects resulting from reflection of the received wave back to the source. This paper examines these effects on the apparent homogeneity of circular polarization. These effects are examined experimentally using an ellipsometer with no sample and compared with calculated results for a single order of reflection. Good agreement is obtained. That the peak-to-peak variations in the observed irradiance are on the order of four times the amplitude reflectance is observed. The angular dependencies of these effects are path length dependent.


Lawrence R. Lawson and Hashim A. Yousif, "Standing Wave Effects in Microwave Ellipsometry," Progress In Electromagnetics Research Letters, Vol. 14, 51-58, 2010.


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