In this paper, a tunable coplanar waveguide (CPW) line using the bismuth zinc niobate (BZN) thin film has been proposed and demonstrated for low-voltage phase shifter applications. In order to reduce the operation bias voltage the air gaps between the signal strip and ground plane are filled with the tunable thin films. At low E-fields of 1.3 kV/cm, the fabricated CPW line shows the phase difference of 10 degree at 10 GHz.
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