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Experimental Investigations on a Surface Micromachined Tunable Low Pass Filter

By Vittal Janardhana, Naga Sayanu Pamidighantam, Neela Chattoraj, Jibendu Roy, Srinivasa Kuppireddi, and Raghavendra Govindra Kulkarni
Progress In Electromagnetics Research Letters, Vol. 27, 171-178, 2011


In this paper, a surface micromachined microwave tunable low pass filter, consisting of tunable shunt capacitors and series inductors, has been realized. The filter exhibits insertion loss of less than 1 dB (up to 10 GHz), stop band attenuation of 20 dB at 20 GHz, and cut-off frequency is changed to 8 GHz with the application of DC actuation voltage in the structure. The filter has an overall dimension of 5.5 mm x 2 mm. The characteristics of tunable filter are investigated with and without packaging.


Vittal Janardhana, Naga Sayanu Pamidighantam, Neela Chattoraj, Jibendu Roy, Srinivasa Kuppireddi, and Raghavendra Govindra Kulkarni, "Experimental Investigations on a Surface Micromachined Tunable Low Pass Filter," Progress In Electromagnetics Research Letters, Vol. 27, 171-178, 2011.


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