In this paper, we report on the design, fabrication and characterization of a slot antenna on quarter wavelength silicon substrate coupled to a Titanium microbolometer for detection at 94 GHz. The detector was fabricated using conventional photolithographic and microfabrication techniques. The detector exhibited a responsivity of 0.779 V/W, a noise equivalent power (NEP) of 10.2 nW/√Hz, and a time constant of 3.88 μsec.
2. Heston, J. G., J. M. Lewis, S. M. Wentworth, and D. P. Neikirk, "Twin slot antenna structures integrated with microbolometer detector for 94 GHz imaging," Microwave and Optical Technology Letters, Vol. 4, 15-19, 1999.
3. Rahman, A. , E. Duerr, G. De Lange, and Q. Hu, "Micromachined room-temperature microbolometer for mm-wave detection and focal-plane imaging arrays," SPIE Proceedings, 122-133, April 1997.
4. Miller, A. J. , A. Luukanen, and E. N. Grossman, "Micromachined antenna-coupled uncooled bolometers for terahertz imaging," SPIE Proceedings, 18-24, April 2004.
5. Milkov, M., "Millimeter-wave imaging system based on antenna-coupled bolometers,", Master of Science Thesis, University of California Los Angeles, 2000.
6. Deal, , W. R., L. Yujiri, M. Siddiqui, and R. Lai, "Advanced MMIC for passive millimeter and submillimeter wave imaging," IEEE International Solid-state Circuits Conference, 572-622, February 2007.
7. Kruse, P. W., "Uncooled Thermal Imaging," SPIE Press, USA, 2001.
8. Dereniak, E. L. and G. D. Boreman, "Infrared Detectors and Systems," Wiley Interscience, USA, 1996.
9. Kobayashi, H. , M. Youki, and Y. Yasouka, "Effects of substrate thickness on the gain of millimeter and submillimeter wave slot antennas," Electronics and Communications in Japan, Vol. 80, 1-10, 1997.